DC glow discharge in argon. Orange plasma is a positive column and the purple is a visible sheath around the spherical cathode.
Atmospheric-pressure microwave-driven plasma torch being used for thin film deposition.
The apparent “light saber” is a surface-wave plasma antenna which creates a high-density, yet low-electron-temperature plasma throughout the chamber.
An etching plasma formed by a helicon source. This type of plasma is used in semiconductor processing.
A stabilized arc in a DC glow discharge. The self-induced magnetic field from the current, confines the arc.
The Hybrid Illinois Device for Research and Applications (HIDRA) is both a stellarator and a tokamak. It confines plasmas with fields as high as 1 Tesla and can run steady-state and is used to study plasma-material interactions relevant to fusion energy technology.


A Focused Degree that Equips You to Exceed Expectations in the Semiconductor Manufacturing Industry

All of the processes which make semiconductor chips involve plasmas: etching, deposition and now lithography due to the introduction of EUV in high-volume manufacturing. Plasma Engineering is a Master of Engineering (M.Eng.) degree that prepares graduates to drive innovation and become leaders in these areas. Knowledge and experience in using and understanding plasmas is vital, but largely missing from the education of the professionals currently in the field. Finding solutions to current and future processing challenges requires a mastery of the core concepts of plasma engineering as well as topical depth in a professional focus area. This professionally-oriented masterʼs degree helps students to develop this expertise and gain hands-on experience with a practicum or a project.

The Master of Engineering in Engineering with a concentration in Plasma Engineering is housed in the Department of Nuclear, Plasma & Radiological Engineering. NPRE is one of the leading departments in plasma science, engineering and technology, with several world renowned faculty members and their respective laboratories.

This non-thesis, 32 credit hour M.Eng. program provides an in depth education in plasma processing, plasma technology and plasma science. This masterʼs degree in Plasma Engineering is specifically designed for students looking to enter industry upon graduation. The detailed curriculum, real-world experience, and laboratory experiences provided by this program equip graduates with the knowledge to utilize, understand and innovate plasma-related applications delivering highly marketable skills that are in demand by employers across various industries.

Program Highlights

  • Earn a Professional Master’s Degree in 2 – 3 semesters.
  • Gain valuable experience through an internship or a design project in plasma engineering.
  • Prepare for leadership in your career by gaining a depth of knowledge and tailored experience.


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