Learn the skills to lead in Plasma Engineering


A Focused Degree that Equips You to Exceed Expectations in the Semiconductor Manufacturing Industry

All of the processes which make semiconductor chips involve plasmas: etching, deposition and now lithography due to the introduction of EUV in high-volume manufacturing. Plasma Engineering is a Master of Engineering (M.Eng.) degree that prepares graduates to drive innovation and become leaders in these areas. Knowledge and experience in using and understanding plasmas is vital, but largely missing from the education of the professionals currently in the field. Finding solutions to current and future processing challenges requires a mastery of the core concepts of plasma engineering as well as topical depth in a professional focus area. This professionally-oriented masterʼs degree helps students to develop this expertise and gain hands-on experience with a practicum or a project.


The Master of Engineering in Engineering with Concentration in Plasma Engineering is housed in the Department of Nuclear, Plasma & Radiological Engineering. NPRE is one of the leading departments in plasma science, engineering and technology, with several world renowned faculty members and their respective laboratories.

This non-thesis, 32 credit hour M.Eng. program provides an in depth education in plasma processing, plasma technology and plasma science. This masterʼs degree in Plasma Engineering is specifically designed for students looking to enter industry upon graduation. The detailed curriculum, real-world experience, and laboratory experiences provided by this program equip graduates with the knowledge to utilize, understand and innovate plasma-related applications delivering highly marketable skills that are in demand by employers across various industries.

Program Highlights


Earn a Professional Master’s Degree in 2 – 3 semesters.

Gain valuable experience through an internship or a design project in plasma engineering.

Prepare for leadership in your career by gaining a depth of knowledge and tailored experience.

Ready to apply?    Start here       Need more information?   Contact us

Dates to Know

Fall term: May 1 (international), July 1 (domestic and UIUC students)
Spring term: November 1 (international), December 1 (domestic and UIUC students)
Summer term: April 1 (all applicants)

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